Gas Purifier for Oxygen and Moisture Removal
A lineup of products for targeted removal of oxygen and moisture,
featuring a visual indicator that clearly shows when replacement is needed
Please note that some moisture removal purifiers do not feature a color-change indicator for replacement timing.
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Competitive Pricing
Strict Cost Control
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Short Lead Time
Available for delivery in approximately two weeks
(made in Japan) -
Regenerable
Reusable at low operating cost
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Usable with
low-purity gasesAdsorbs and removes target species even in low-purity gases.
Application Examples
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1. Deoxidation and drying of process gases for heat-treatment and reduction furnaces
2. Deoxidation and drying of argon gas for welding
3. Biosynthesis
4. For sputtering and CVD systems
5. For zero calibration of oxygen analyzers -
6. For thermal analyzers
7. Other Carrier Gases for Semiconductor Manufacturing
8. Carrier gas for gas chromatography
9. Oxygen removal and other purification processes for fill gases used in various light bulbs.
10. Dehydration of Various Gases
Ultra-High-Performance Oxygen Removal Column
The FPGC is an ultra-high-performance oxygen removal column that is installed in-liney
and instantl adsorbs oxygen from the process gas, achieving an outlet oxygen concentration
of 2 ppb or less regardless of the inlet oxygen concentration.
Upon adsorbing oxygen, the column changes color from light green to dark brown,
allowing the user to easily monitor its operating status at a glance.
| Appearance |  |
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| Model Name |
Model No. | FPGC-70X | FPGC-RP | FPGC-RX | FPGC-SLX | ||||
| Inlet Gas Conditions |
Applicable Gases | Helium (He) / Hydrogen (H₂) / Neon (Ne) / Argon (Ar) / Nitrogen (N₂) / Krypton (Kr) / Xenon (Xe) / Deuterium (D₂) / Methane (CH₄) / Ethane (C₂H₆) / Propane (C₃H₈) / Butane (C₄H₁₀) / Propylene (C₃H₆) / Butadiene (C₄H₆) |
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| Non-Applicable Gases | O₂ / N₂O / NO₂ / CO / Cl₂ / Br₂ / HCl / HBr / SiH₄ / NH₃ / SO₂ / H₂S / Other highly reactive gases | ||||||||
| Purification Performance |
Impurities to be Removed | Oxygen | |||||||
| Concentration of Impurities in Outlet Gas | ≤ 2 ppb | ||||||||
| O₂ Adsorption Capacity | 50mL | 60mL | 200mL | 1500mL | |||||
| Operating Conditions |
Flow Rate Range* | ≤ 5 NL/min | ≤ 10 NL/min | ||||||
| Pressure Range | ≤ 0.5 MPaG | ||||||||
| Operating Temperature Range | 5–35 ℃ | ||||||||
| Specifications | Dimensions* | standard | Ø42 mm × | 165 mm | Ø25 mm × | 420 mm | Ø42 mm × | 393 mm | Ø60 mm ×390 mm |
| VCR® | 204 mm | 463 mm | 433 mm | - | |||||
| Weight | 220 g | 260 g | 500 g | 930 g | |||||
| Connections | standard | 1/4-inch Swagelok® Tube Fitting | |||||||
| VCR® | 1/4-inch VCR® Fitting | - | |||||||
| Materials of Construction | Pyrex Tube Protected by an Acrylic Pipe | ||||||||
*1 Flow rate (L/min) at standard conditions (0 ℃, 101.325 kPa). *2 Installation length
The values listed here are typical values based on actual measurements and are not guaranteed specifications.
For details, please refer to the brochure and instruction manual.
Ultra-High-Performance Dryer for Moisture and Oxygen Removal
The FPDC (DC Series) is a high-performance dryer that adsorbs and removes moisture from various gases.
The achievable dew point is −100 ℃ or lower (measured at the outlet using a cavity ring-down spectroscopy (CRDS) moisture analyzer under conditions of an inlet dew point of −70 ℃ and a flow rate of 0.4 L/min).
FPDC-SXC turns milky white upon adsorption of moisture.
The FPCC Series “FPCC-X” integrates FPDC and FPGC into a single unit.
Moisture is first removed by the FPDC, followed by oxygen removal by the FPGC.
| Appearance |  |
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| Model Name |
Model No. | FPDC-A4 | FPDC-L4 | FPDC-SXC | FPCC-X | ||||
| Applications | For General Gas Use | For High Flow Rates | For High Humidity Conditions | Moisture and Oxygen Removal | |||||
| Inlet Gas Conditions |
Applicable Gases | Helium (He) / Hydrogen (H₂) / Neon (Ne) / Argon (Ar) / Oxygen (O₂)*3 / Nitrogen (N₂) / Krypton (Kr) / Xenon (Xe) / Methane (CH₄) / Ethane (C₂H₆) / Propane (C₃H₈) / Butane (C₄H₁₀) |
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| Non-Applicable Gases | N₂O / NO₂ / CO / CO₂ / Cl₂ / Br₂ / HCl / HBr / SiH₄ / NH₃ / SO₂ / H₂S / D₂ / C₂H₂ / C₂H₄ / C₃H₆ / C₄H₆ | ||||||||
| Purification Performance |
Impurities to be Removed | Moisture | Oxygen,moisture | ||||||
| Concentration of Impurities in Outlet Gas | Moisture: Achievable Dew Point ≤ −100 ℃ | Moisture: Achievable Dew Point ≤ −64 ℃ | Oxygen: ≤ 2 ppb Moisture: Achievable Dew Point ≤ −100 ℃ |
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| Performance | Processing capacity: 1,000 m³ at an inlet dew point of −76 ℃ |
Processing capacity: 4,000 m³ at an inlet dew point of −76℃ | Moisture adsorption capacity: 25 g at an inlet dew point of 8 ℃ | Oxygen adsorption capacity: 100 mL Processing capacity: 500 m³ at an inlet dew point of −76 ℃ |
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| Operating Conditions |
Flow Rate Range* | ≤ 10 NL/min | ≤ 40 NL/min | ≤ 10 NL/min | ≤ 5 NL/min | ||||
| Pressure Range | ≤ 0.5 MPaG | ||||||||
| Operating Temperature Range | 5–35 ℃ | ||||||||
| Specifications | Dimensions* | standard | Ø34 mm × | 352 mm | Ø51 mm × | 610 mm | Ø42 mm ×405 mm | Ø42 mm ×393 mm | |
| VCR® | 395 mm | 666 mm | - | ||||||
| Weight | 500 g | 1900 g | 630 g | 550 g | |||||
| Connections | standard | 1/4-inch Swagelok® Tube Fitting | |||||||
| VCR® | 1/4-inch VCR® Fitting | 1/2-inch VCR® Fitting | - | ||||||
| Materials of Construction | SUS304 | Pyrex Tube Protected by an Acrylic Pipe | |||||||
*1 Flow rate (L/min) at standard conditions (0 ℃, 101.325 kPa). *2 Installation length *3 For FPCC-X, O₂ is not applicable.
The values listed here are typical values based on actual measurements and are not guaranteed specifications.
For details, please refer to the brochure and instruction manual.
