Equipment for stably supplying ultrahigh-purity gases required for
industry

Various high-purity inert gases (argon, nitrogen, etc.) and hydrogen (H2), which play an important role as zero gas for
microanalyzers, explosion-proof shielding gas for welding or as the foundation for ultra-precision processing technology, can be
refined to ultrahigh purity by removing impurity components using easy-to-introduce in-line equipment.

Concerns about introduction of ultrahigh-purity gas equipment

• 

  We want to use ultrahigh-purity gas but
  are concerned about the cost.

  

• 

  We have no space for gas purification equipment.
  

  

• 

  We want to use only a small amount of ultrahigh-purity gas.
  

  

• 

  We do not have enough flow with an inline system and are concerned about the cost.
  

  

• 

  We are also concerned about running costs and maintainability.
  
  

  

All problems solved by Osaka Gas Liquid's high-purity gas purification equipment

Features of high-purity gas purification equipment

• Refining ultrahigh-purity gas

  Impurity concentration:
  less than 1 ppb
  99.999 vol% minimum

  It refines gas to ultrahigh purity through a combination of multiple catalysts and adsorbents.

• Helping improve economy and reduce costs

  The adsorbents are renewable, requiring no replacement.

  The simplified structure has reduced production costs.

  No utilities are required.

  The renewable adsorbents for impurities and the simplified structure help reduce both initial and running costs.

• Compact, space-saving inline system
  

  

  It can be used simply by attaching it to the existing gas facilities. Further compactness is achieved through the use of newly developed catalysts.

• Compatible with two types of gases: inert gases and hydrogen
  

  

  A lineup from 3 liters to 300 liters per minute is available for purification of various gases, including inert gas and hydrogen.

Main applications

• Carrier gas/
  zero gas for
  microanalyzers
• Shield gas for welding
  
• Atmospheric gas
  Purge gas
  For a variety of semiconductor manufacturing equipment, CVD equipment, etc.
  (For equipment requiring high purity)